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  SLIT V/V ACTUATOR_PNEUMATIC_  

  품명 : SLIT V/V ACTUATOR_PNEUMATIC_

  Vendor P/N : 0190-31117

  사용장비 : PRODUCER GT

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  SLIT V/V ACTUATOR_243788_ULTIMA_X SLIT A  

  품명 : SLIT V/V ACTUATOR_243788_ULTIMA_X SLIT A

  Vendor P/N : 0190-13690-VAT

  사용장비 : Applied Ultima

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  ACTUATOR_PNEUMATIC_  

  품명 : ACTUATOR_PNEUMATIC_

  Vendor P/N : 243788

  사용장비 : Applied Ultima

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  PRODUCER GT ACTUATOR  

  품명 : PRODUCER GT ACTUATOR

  Vendor P/N : 0340X-CA24-BXC1

  사용장비 : PRODUCER GT

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  R)LOADLOCK ACTUATOR_CHALL HT  

  품명 : R)LOADLOCK ACTUATOR_CHALL HT

  Vendor P/N : R)XGT310-30-1A-X2

  사용장비 :

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  SLIT V/V ACTUATOR  

  품명 : SLIT V/V ACTUATOR

  Vendor P/N : 04112-BA24-AAK2

  사용장비 : TES

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  NOVELLUS LOADLOCK VAT VALVE  

  품명 : NOVELLUS LOADLOCK VAT VALVE

  Vendor P/N : 07512-UA24-0002

  사용장비 : NOVELLUS VECTOR EXP/STD ATM DOOR

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  SLIT VALVE ACTUATOR_VAT L-TYPE_301628_04  

  품명 : SLIT VALVE ACTUATOR_VAT L-TYPE_301628_04

  Vendor P/N : 301628

  사용장비 : TES SLIT

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  R) XGT300-30-1A-X1 LOADLOCK TO CHAMBER SLIT ACTUATOR  

  품명 : R) XGT300-30-1A-X1 LOADLOCK TO CHAMBER SLIT ACTUATOR

  Vendor P/N : R)XGT300

  사용장비 : NOVELLUS VECTOR L/L TO CH용

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  RECTANGULAR INSERT MONOVAT DN SPECIAL  

  품명 : RECTANGULAR INSERT MONOVAT DN SPECIAL

  Vendor P/N : 0310X-CA24-AKK3

  사용장비 :

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  SLIT V/V_IRF-05105-2-01( V-TEX )_CHAMBER_  

  품명 : SLIT V/V_IRF-05105-2-01( V-TEX )_CHAMBER_

  Vendor P/N :

  사용장비 : MAHA_HP1 & SP/SPX

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  TES SLIT ACTUATOR  

  품명 : TES SLIT ACTUATOR

  Vendor P/N : 820-0027( 04112-BA24 )

  사용장비 : TES SLIT

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  PRODUCER SE FI TO LL SLIT ACTUATOR  

  품명 : PRODUCER SE FI TO LL SLIT ACTUATOR

  Vendor P/N : 0750X-UE24

  사용장비 : PRODUCER_SE ATM DOOR

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  SLIT V/V ACTUATOR  

  품명 : SLIT V/V ACTUATOR

  Vendor P/N : 0210X-BA24-BLN1/0042

  사용장비 : MAHA_HP1 & PRODUCER_SE

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  SLIT VALVE ASSY  

  품명 : SLIT VALVE ASSY

  Vendor P/N : 3870-02872

  사용장비 : PRODUCER SE

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  L/L SLIT VALVE_MAHA_SP  

  품명 : L/L SLIT VALVE_MAHA_SP

  Vendor P/N : 3D2L000001

  사용장비 : ATTO MAHA SP

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  SMC LOADLOCK TO DCVS VALVE  

  품명 : SMC LOADLOCK TO DCVS VALVE

  Vendor P/N : 63-136020-01

  사용장비 : NOVELLUS VECTOR L/L TO CH용

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  LOADLOCK TO CHAMBER SLIT ACTUATOR  

  품명 : LOADLOCK TO CHAMBER SLIT ACTUATOR

  Vendor P/N : XGT300-30-1A-X1S

  사용장비 : NOVELLUS VECTOR L/L TO CH용